Handbook of VLSI microlithography principles, tools, technology and applications

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Material type: Text

TextPublication details: Mumbai; Jaico; 2005Description: xix, 1001p. : illISBN:

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Holdings
Item type	Home library	Collection	Call number	Status	Barcode
BOOKS	AMRITA SCHOOL OF ENGINEERING	REFERENCE	621.38.049(035) VLSI/P5 (Browse shelf(Opens below))	Not for loan	32116

Includes bibliographical references and index.

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Central Library - Coimbatore