Poly-siGe for MEMs-above-CMOs sensors
Pilar Gonzalez Ruiz
Poly-siGe for MEMs-above-CMOs sensors - 2014 - springer 2014 - springer series in Advanced Microelectronics .
9789400767997
Electronic Circuits and systems
Engineering
Poly-siGe for MEMs-above-CMOs sensors - 2014 - springer 2014 - springer series in Advanced Microelectronics .
9789400767997
Electronic Circuits and systems
Engineering