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Ion beams : with applications to ion implantation

Wilson, Robert G

Ion beams : with applications to ion implantation - New York John Wiley 1973 - xii, 500p

ISBN: 0-471-95000-9

Subjects--Topical Terms:
Electron - Ion Exchange
Electronic Beams - Ion Implantation
Ion Implantation - Electronic Beams
Mechanical Engineering

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Ion beams : with applications to ion implantation