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Thin-film deposition : principles and practice

Smith, Donald L

Thin-film deposition : principles and practice - New York McGraw-Hill 1995 - xxiii, 616p: ill.

Includes bibliographical references and index.

ISBN: 0-07-113913-3

Subjects--Topical Terms:
Epitaxy
Gas kinetics
Physics
Thin film -- Deposition
Thin film -- Evaporation and deposition
Thin film devices
Vacuum technology
Vapor-plating

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Thin-film deposition : principles and practice