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Mechanical microsensors

Elwenspoek, M

Mechanical microsensors - New York Springer Verlag 2001 - x, 2695p. - Microtechnology and MEMS .

Includes bibliographical references and index.

ISBN: 3540675825

Subjects--Topical Terms:
Detectors -- Design and construction
Microelectromechanical systems -- Design and construction
Micromachining
Silicon
Transducers

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Mechanical microsensors