The MEMS handbook
Gad-el-Hak, Mohamed, Ed.
The MEMS handbook - Boca Raton CRC Press 2002 - ill. - The Mechanical engineering handbook series .
Includes bibliographical references and index
849300770
Mechanical engineering -- Handbook
Microelectromechanical systems
The MEMS handbook - Boca Raton CRC Press 2002 - ill. - The Mechanical engineering handbook series .
Includes bibliographical references and index
849300770
Mechanical engineering -- Handbook
Microelectromechanical systems