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MEMS and microsystems : design and manufacture

Hsu, Tai-Ran

MEMS and microsystems : design and manufacture - New Delhi Tata McGraw-Hill 2002 - xii, 436p.

Includes index

ISBN: 007048709x

Subjects--Topical Terms:
Microelectromechanical systems
Microelectronics
Microsystems

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MEMS and microsystems : design and manufacture