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MEMS and NEMS : systems, devices and structures

Lyshevski, Sergey Edward

MEMS and NEMS : systems, devices and structures - New York CRC Press 2002 - 461p.

Includes bibliographical references and index

ISBN: 849312620

Subjects--Topical Terms:
Computer-Aided design -- MEMS and NEMS
MEMS)
Microelectromechanical systems (
Nano electromechanical systems(
NEMS)

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MEMS and NEMS : systems, devices and structures