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Micro electro mechanical system design

Allen, James, J

Micro electro mechanical system design - New York Taylor and Francis 2005 - 465p.

Includes bibliographical references and index

ISBN: 0-8247-5824-2

Subjects--Topical Terms:
Chemical mechanical polishing
Electromechanics
Engineering design
Mechanics -- Micrelectro mechanics
MEMS) -- Tools and Technics
Metal polishing -- Chemical mechanical polishing
Microelectromechanical systems (

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Micro electro mechanical system design