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Materials science of thin films : deposition and structure

Ohring, Milton

Materials science of thin films : deposition and structure - 2 - New Delhi Elsevier 2002 - xxi, 794p: ill.

Reprint year 2006. Includes bibliographical references and index.

ISBN: 81-312-0279-8

Subjects--Topical Terms:
Epitaxy
Film structure
Materials science -- Thin films
Physics
Thin film nucleation
Thin films -- Deposition and structure
Thin films -- Mechanical properties
Vacuum science

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Materials science of thin films : deposition and structure