Normal view MARC view ISBD view

Introduction to microfabrication

Franssila, Sami

Introduction to microfabrication - New York John Wiley 2004 - xvii, 401p.

Includes bibliographical references and index

ISBN: 0-470-85106-6

Subjects--Topical Terms:
Electronic apparatus and Appliances
Electronic materials --
Etching -- Electrochemical etching
MEMS)
Metrology -- Micrometrology
Microelectromechanical systems (
Microfabrication
Silicon meterials
Thinfilm materials

Print
Cite
Add to your cart (remove)
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

Central Library - Coimbatore

Introduction to microfabrication