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foundations of MEMS

Liu, Chang

foundations of MEMS - New Jersey Pearson Education 2006 - xxii, 530p.

Includes bibliographical references and index

ISBN: 013199204X

Subjects--Topical Terms:
Electrostatic sensing
Microelectromechanical systems
Microfabrication
Optical MEM
Piezoresistive sensors
Polymer mems

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Central Library - Coimbatore

foundations of MEMS