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VLSI : technology, design and basics of microelectronics

Singh, R K

VLSI : technology, design and basics of microelectronics - New Delhi S. K. Kataria and Sons 2004 - xv, 419p.

Includes index

ISBN: 8188458171

Subjects--Topical Terms:
Bipolar IC Technology
Film deposition
Integrated circuits -- VLSI
Lithography
MOSFET and MOS Fabrication technology
Photoresist and etching
Very large scale integration(VLSI) -- Design
VLSI Technology

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VLSI : technology, design and basics of microelectronics