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Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)

McGuire, Gary E, Ed.

Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) - Mumbai Jaico 2007 - xiii, 675p. ;

Includes bibliographical references and index.

ISBN: 8179925374

Subjects--Topical Terms:
Process technology -- Handbook
Semiconductor materials -- Handbook
Ultra large scale integration (ULSI)
Very large scale integration(VLSI)

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Central Library - Coimbatore

Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)