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MEMS

Mahalik, Nitaigour Premchand

MEMS - New Delhi Tata McGraw-Hill 2007 - xviii, 477p. ;

Includes bibliographical references and index

ISBN: 70634459

Subjects--Topical Terms:
Biomedical microsystems
Mechanaical mems
MEMS)
Microelectromechanical systems (
Micromachining
Nanosystem design
Radio frequency mems
RF MEMS
Sensors and Actuators -- Mechanical and Thermal

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MEMS