VLSI Technology
Sze, S M, Ed.
VLSI Technology - 2 - New York McGraw-Hill 1988 - xii, 676p:
Includes index
71003479
Dielectric and polysilicon film deposition
Integrated circuits -- VLSI
Lithography -- X-Ray lithography
Very large scale integration(VLSI)
VLSI Technology
VLSI Technology - 2 - New York McGraw-Hill 1988 - xii, 676p:
Includes index
71003479
Dielectric and polysilicon film deposition
Integrated circuits -- VLSI
Lithography -- X-Ray lithography
Very large scale integration(VLSI)
VLSI Technology