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Mechanics of microelectromechanical systems

Lobontiu, Nicolae

Mechanics of microelectromechanical systems - New York Kluwer Academic 2005 - xi, 405p.

Includes index

ISBN: 978818128849

Subjects--Topical Terms:
Electromagnetic transduction
MEMS) Design
Microbridges Mems applications
Microcantilevers
Microelectromechanical systems (
Microtransduction -- Actuation and Sensing

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Mechanics of microelectromechanical systems