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MEMS and MOEMS technology and applications

Rai-Choudhury, P, ed.

MEMS and MOEMS technology and applications - New Delhi PHI Learning 2000 - xi, 520p.

Includes index

ISBN: 9788120337527

Subjects--Topical Terms:
MEMS technology
MEMS/MOEMS devices -- Operation and Design
Micro-Electromechanical systems
Micro-Optoelectromechanical systems(MOEMS)
MOEMS technology
Optical communications networks Silicon micromachines
Optical microsystem Modeling and Simulation

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MEMS and MOEMS technology and applications