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Comprehensive microsystems - vol.3 : optical systems industrial applications emerging topics

Gianchandani, Yogesh B, ed.

Comprehensive microsystems - vol.3 : optical systems industrial applications emerging topics - Elsevier Netherlands 2008 - xx, 737p

Includes index

ISBN: 9780444521941

Subjects--Topical Terms:
MEMS
Microelectromechanical systems

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Comprehensive microsystems - vol.3 : optical systems industrial applications emerging topics