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MOEMS : micro-opto-electro-mechanical systems

Motamedi, Manouchehr E, ed.

MOEMS : micro-opto-electro-mechanical systems - New Age International New Delhi 2010 - xxi, 614p

Includes index

ISBN: 9788122428339

Subjects--Topical Terms:
Fiber optic systems
MEMS and MOEMS CAD
Micro-optics
Micro-opto-electro-mechanical systems
Microfabrication
MOEMS

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MOEMS : micro-opto-electro-mechanical systems