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Design for manufacturability and yield for nano-scale CMOS

Chiang, Charles C

Design for manufacturability and yield for nano-scale CMOS - New Delhi Springer 2007 - xxvii, 254p.

Includes bibliographical references and index

ISBN: 9788184892444

Subjects--Topical Terms:
CMOS
Design for manufacturability(DFM) and yield(DFY) -- Nano-Scale CMOS
DFMDFY IC Manufacturing
Nanoscale CMOS
Systematic yield CMP

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Design for manufacturability and yield for nano-scale CMOS