Fundamentals of microfabrication and nanotechnology - vol. 1 : solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Madou, Marc J
Fundamentals of microfabrication and nanotechnology - vol. 1 : solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology - 3 - Boca Raton CRC Press 2012 - xiii,642
9781420055115
Crystallography
MEMS and NEMS
Microfabrication
Nanotechnology
Photonics
Quantum mechanics
Solidstate physics, Fluidics
Fundamentals of microfabrication and nanotechnology - vol. 1 : solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology - 3 - Boca Raton CRC Press 2012 - xiii,642
9781420055115
Crystallography
MEMS and NEMS
Microfabrication
Nanotechnology
Photonics
Quantum mechanics
Solidstate physics, Fluidics