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Silicon VLSI technology : fundamentals, practice and modeling

Plummer, James D.

Silicon VLSI technology : fundamentals, practice and modeling - New Delhi Pearson 2009 - xiv, 817p.

Includes bibliographical references and index

ISBN: 9788131726044

Subjects--Topical Terms:
Back-end technology
CMOS technology
Dopant diffusion
Lithography
Semiconductor manufacturing
Silicon VLSI Technology
Thin film deposition

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Silicon VLSI technology : fundamentals, practice and modeling