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Micorsensors, MEMS and smart devices

Gardner, Julian W

Micorsensors, MEMS and smart devices - New Delhi John Wiley & Sons 2001 - xii, 388p. : ill.

Includes bibliographical references and index

ISBN: 9788126540822

Subjects--Topical Terms:
Electronic materials and processing
MEMS and smart devices
Microelectronic technologies
Microsensors
Silicon micromachining
Smart sensors and MEMS

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Micorsensors, MEMS and smart devices