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Microsensors, MEMS, and smart devices

Gardner, Julian W

Microsensors, MEMS, and smart devices - New Delhi Wiley India 2012 - xxi, 883p.

Includes bibliographical references and index

ISBN: 9788126540822

Subjects--Topical Terms:
Electronic materials and processing
MEMS and smart devices
Microelectronic technologies
Microsensors
Silicon micromachining
Smart sensors and MEMS

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Microsensors, MEMS, and smart devices