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The physics of micro/nano-fabrication

Brodie, Ivor

The physics of micro/nano-fabrication - New York Plenum Press 1992 - xix, 771p.

Includes bibliographical references and index

ISBN: 9788184894134

Subjects--Topical Terms:
Micro/nano-fabrication
Microelectronics
Microfabrication
Nanofabrication
Thin-film circuits

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Central Library - Coimbatore

The physics of micro/nano-fabrication