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MEMS and microsystems : design and manufacture

Hsu, Tai-Ran

MEMS and microsystems : design and manufacture - New Delhi McGraw Hill 2002 - xii, 436p.

Includes bibliographical references and index

ISBN: 9780070487093

Subjects--Topical Terms:
Microelectronics -- Microelectromechanical systems (MEMS)
Microsystem
Scaling laws Miniaturisation

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MEMS and microsystems : design and manufacture