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Fundamentals of microfabrication science of miniaturization

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Material type: Text

TextPublication details: Boca Raton; CRC Press; 2002Edition: 2Description: 723pISBN:

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Holdings
Item type	Home library	Collection	Call number	Status	Barcode
BOOKS	AMRITA SCHOOL OF ENGINEERING	REFERENCE	621.382 P20 (Browse shelf(Opens below))	Not for loan	24197

Includes bibliographical references and index

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Central Library - Coimbatore