TY  - DATA
AU  - sujeet K. sinha
AU  -  N. satyanarayana
AU  -  seh Chun Lim
TI  - Nano-tribology and Materials in MEMs
SN  - 9783642369353
PB  - springer
KW  - Engineering
KW  - Microsystems and MEMs
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-642-36935-3
ER  -