Gordon A. shaw <br/><br/>
"MEMs and Nanotechnology, Volume 6" 

 - 2013 
 -  springer  2013 
 - Conference Proceedings of the society for Experimental Mechanics series .
<br/><br/><label>ISBN: </label>9781461444367 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Microsystems and MEMs