TY  - DATA
AU  - Pilar Gonzalez Ruiz
AU  -  Ann Witvrouw
AU  -  Kristin De Meyer
TI  - Poly-siGe for MEMs-above-CMOs sensors
T2  - springer series in Advanced Microelectronics
SN  - 9789400767997
PB  - springer
KW  - Electronic Circuits and systems
KW  - Engineering
UR  - https://link.springer.com/openurl?genre=book&isbn=978-94-007-6799-7
ER  -