Lena Zentner <br/><br/>
Microactuators and Micromechanisms 

 - 1st ed. 2017 
 -  springer  2017 
 - Mechanisms and Machine science .
<br/><br/><label>ISBN: </label>9783319453873 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Microsystems and MEMs