Barton C. Prorok <br/><br/>
"MEMs and Nanotechnology, Volume 8" 

 - 2015 
 -  springer  2015 
 - Conference Proceedings of the society for Experimental Mechanics series .
<br/><br/><label>ISBN: </label>9783319070049 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Microsystems and MEMs