TY  - DATA
AU  - Barton C. Prorok
AU  -  Jennifer Hay
AU  -  LaVern starman
TI  - "MEMs and Nanotechnology, Volume 8"
T2  - Conference Proceedings of the society for Experimental Mechanics series
SN  - 9783319070049
PB  - springer
KW  - Engineering
KW  - Microsystems and MEMs
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-07004-9
ER  -