TY  - DATA
AU  - Hans H. Gatzen
AU  -  Jurg Leuthold
AU  -  Volker saile
TI  - Micro and Nano Fabrication
SN  - 9783662443958
PB  - springer
KW  - Engineering
KW  - Microsystems and MEMs
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-662-44395-8
ER  -