Manfred Kaltenbacher <br/><br/>
Numerical simulation of Mechatronic sensors and Actuators 

 - 3rd ed. 2015 
 -  springer  2015 
<br/><br/><label>ISBN: </label>9783642401701 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Microsystems and MEMs