TY - DATA AU - Yogesh M. Joshi AU - sameer Khandekar TI - Nanoscale and Microscale Phenomena T2 - springer Tracts in Mechanical Engineering SN - 9788132222897 PB - springer KW - Engineering KW - Microsystems and MEMs UR - https://link.springer.com/openurl?genre=book&isbn=978-81-322-2289-7 ER -