TY  - DATA
AU  - Alexey Ivanov
AU  -  Harish Singh Rawat
AU  -  Simy Antony
TI  - Silicon Anodization as a Structuring Technique
SN  - 9783658192389
PB  - Springer
KW  - Engineering
KW  - Microsystems and MEMS
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-658-19238-9
ER  -