TY  - DATA
AU  - Changhai Ru
AU  -  Bruno Baruque
AU  -  Fanny Klett
TI  - Nanopositioning Technologies
SN  - 9783319238531
PB  - Springer
KW  - Engineering
KW  - Microsystems and MEMS
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-23853-1
ER  -