TY  - DATA
AU  - Gordon Shaw III
AU  -  Erez Dekel
TI  - MEMS and Nanotechnology Volume 5
T2  - Conference Proceedings of the Society for Experimental Mechanics Series
SN  - 9783319007809
PB  - Springer
KW  - Engineering
KW  - Microsystems and MEMS
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-00780-9
ER  -