Weimin Zhou <br/><br/>
Nanoimprint Lithography: An Enabling Process for Nanofabrication 

 - 2013 
 -  Springer  2013 
<br/><br/><label>ISBN: </label>9783642344282 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Microsystems and MEMS