TY  - DATA
AU  - Weimin Zhou
AU  -  Hisao Shiizuka
AU  -  Kun Pyo Lee
TI  - Nanoimprint Lithography: An Enabling Process for Nanofabrication
SN  - 9783642344282
PB  - Springer
KW  - Engineering
KW  - Microsystems and MEMS
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-642-34428-2
ER  -