TY  - DATA
AU  - Dan Zhang
TI  - Advanced Mechatronics and MEMS Devices II
T2  - Microsystems and Nanosystems
SN  - 9783319321806
PB  - Springer
KW  - Engineering
KW  - Microsystems and MEMS
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-32180-6
ER  -