TY  - DATA
AU  - Andrew J Fleming
AU  -  Puzina Yulia
AU  -  Vladimir Levashov
TI  - Design Modeling and Control of Nanopositioning Systems
T2  - Advances in Industrial Control
SN  - 9783319066172
PB  - Springer
KW  - Control and Systems Theory
KW  - Engineering
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-06617-2
ER  -