TY  - DATA
AU  - Mark J Jackson
AU  -  Janusz Kacprzyk
AU  -  Oscar Castillo
TI  - Micro and Nanomanufacturing Volume II
SN  - 9783319671321
PB  - Springer
KW  - Engineering
KW  - Microsystems and MEMS
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-67132-1
ER  -