TY  - DATA
AU  - Qing An Huang
AU  -  Ravi Kant
TI  - Micro Electro Mechanical Systems
T2  - Micro/Nano Technologies
SN  - 9789811059452
PB  - Springer
KW  - Engineering
KW  - Mechatronics
UR  - https://link.springer.com/openurl?genre=book&isbn=978-981-10-5945-2
ER  -