TY - DATA AU - Ajay Giri Prakash Kottapalli AU - Debarun Sengupta AU - Kai Tao TI - Self Powered and Soft Polymer MEMS/NEMS Devices T2 - SpringerBriefs in Applied Sciences and Technology SN - 9783030055547 PB - springer KW - Biomedical Engineering and Bioengineering KW - Engineering UR - https://link.springer.com/openurl?genre=book&isbn=978-3-030-05554-7 ER -