TY - DATA AU - Paolo Di Barba AU - Slawomir Wiak TI - MEMS: Field Models and Optimal Design T2 - Lecture Notes in Electrical Engineering SN - 9783030214968 PB - springer KW - Instrumentation KW - Electronics and Microelectronics KW - Engineering UR - https://link.springer.com/openurl?genre=book&isbn=978-3-030-21496-8 ER -