Kirill Poletkin <br/><br/>
Levitation Micro Systems 

 - 2021 
 -  springer  2021 
 - Microsystems and Nanosystems .
<br/><br/><label>ISBN: </label>9783030589080 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Microsystems and MEMS