TY  - DATA
AU  - Alissa M   Fitzgerald
AU  -  Carolyn D  White
AU  -  Charles C  Chung
TI  - MEMS Product Development
T2  - Microsystems and Nanosystems
SN  - 9783030617097
PB  - springer
KW  - Engineering
KW  - Microsystems and MEMS
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-030-61709-7
ER  -